Chemshunalumina wafer polishing phaj/tig lub rooj yog ua los ntawm cov khoom siv alumina uas muaj purity siab 99.7-99.9%. Cov khoom siv alumina ceramic uas muaj purity siab muaj qhov ruaj khov thiab zoo heev rau kev txhuam wafer thiab tswj tau qhov zoo ntawm qhov chaw ntev. Nws yog tsim los ntawm PIBM. Nws yog ib tug tswv cuab ntawm kev lag luam semiconductor vim nws qhov kev ruaj khov thermal thiab dimensional thiab kev tiv taus rau cov khoom siv microchip loj heev.
Kev Npaj Ua Los Ntawm Tshuaj Lom Zem (Chemical-Mechanical Planarization - CMP), tseem hu ua Kev Txhuam Txhuam Txhuam, nws yog ib txoj kev siv tshuab hauv cov txheej txheem tsim khoom ntawm cov khoom siv semiconductor. Nws siv cov tshuaj lom neeg xeb thiab cov zog kho tshuab los ua kom cov silicon wafers lossis lwm cov khoom siv substrate du thaum lub sijhawm ua tiav.
Cov khoom siv CMP feem ntau muab faib ua ob ntu: qhov polishing thiab qhov ntxuav. Qhov polishing muaj 4 ntu, uas yog 3 lub polishing turntables thiab wafer loading thiab unloading module. Qhov ntxuav yog lub luag haujlwm rau kev ntxuav thiab ziab ntawm wafer kom ua tiav "qhuav rau hauv thiab qhuav tawm" ntawm wafer. Hauv tag nrho cov khoom siv polishing, alumina ceramics ua lub luag haujlwm tseem ceeb.
Alumina ceramics feem ntau yog siv los npaj cov wafer polishing discs, uas xav tau kev ntshiab siab, kev ruaj khov tshuaj lom neeg siab, thiab kev tswj hwm zoo ntawm cov duab nto thiab roughness.
Chemshun 99.7% Al2O3 ceramic sib tsoo disc yog ua los ntawm cov khoom siv ceramic siab heev, uas yog qhov tsim nyog rau kev sib tsoo zoo ntawm ntau yam khoom siv, tshwj xeeb tshaj yog rau kev sib tsoo ntawm cov khoom tawg xws li wafers, ceramics thiab iav. Peb cov ceramic sib tsoo disc tuaj yeem ua rau ntau qhov ntau thiab tsawg raws li cov qauv sib tsoo thiab polishing sib txawv.
Lub sijhawm tshaj tawm: Tsib Hlis-30-2025